Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982194 | Single nanoparticle tracking spectroscopic microscope | Haw Yang, Hu Cang, Chung Ming Wong | 2011-07-19 |
| 7018276 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Xuyen Pham, David Wei, Tony Luong | 2006-03-28 |
| 7001243 | Neural network control of chemical mechanical planarization | Jingang Yi | 2006-02-21 |
| 6991512 | Apparatus for edge polishing uniformity control | Travis R. Taylor | 2006-01-31 |
| 6953391 | Methods for reducing slurry usage in a linear chemical mechanical planarization system | Sabir A. Majumder, Zhefei J. Chen | 2005-10-11 |
| 6949020 | Methods for making reinforced wafer polishing pads and apparatuses implementing the same | Eugene Zhao, Fen Dai | 2005-09-27 |
| 6931330 | Methods for monitoring and controlling chemical mechanical planarization | Jingang Yi | 2005-08-16 |
| 6930782 | End point detection with imaging matching in semiconductor processing | Jingang Yi | 2005-08-16 |
| 6806100 | Molded end point detection window for chemical mechanical planarization | Patrick P. Wu, Xuyen Pham | 2004-10-19 |
| 6790128 | Fluid conserving platen for optimizing edge polishing | Travis R. Taylor | 2004-09-14 |
| 6761626 | Air platen for leading edge and trailing edge control | Anthony de la Llera, Xuyen Pham, David Wei, Tony Luong | 2004-07-13 |
| 6729945 | Apparatus for controlling leading edge and trailing edge polishing | Jeff Gasparitsch, Robert Taff, Kenneth J. Bahng, Paul H. Stasiewicz, Erik H. Engdahl | 2004-05-04 |
| 6712679 | Platen assembly having a topographically altered platen surface | Travis R. Taylor, Kevin T. Crofton, Eugene Zhao | 2004-03-30 |
| 6656030 | Unsupported chemical mechanical polishing belt | Brian Lombardo | 2003-12-02 |
| 6620035 | Grooved rollers for a linear chemical mechanical planarization system | — | 2003-09-16 |
| 6572463 | Methods for making reinforced wafer polishing pads utilizing direct casting and apparatuses implementing the same | Eugene Zhao, Fen Dai | 2003-06-03 |
| 6561889 | Methods for making reinforced wafer polishing pads and apparatuses implementing the same | Eugene Zhao, Fen Dai | 2003-05-13 |
| 6552812 | Method and system for measuring threshold length | Yuexing Zhao | 2003-04-22 |
| 6406363 | Unsupported chemical mechanical polishing belt | Brian Lombardo | 2002-06-18 |
| 6315634 | Method of optimizing chemical mechanical planarization process | Alan J. Jensen | 2001-11-13 |