Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746320 | Linear reciprocating disposable belt polishing method and apparatus | Wilbur C. Krusell, Glenn W. Travis, James Bagley | 2004-06-08 |
| 6729945 | Apparatus for controlling leading edge and trailing edge polishing | Cangshan Xu, Jeff Gasparitsch, Robert Taff, Kenneth J. Bahng, Paul H. Stasiewicz | 2004-05-04 |
| 6716093 | Low friction gimbaled substrate holder for CMP apparatus | Michael D. Steiman, Paul H. Stasiewicz | 2004-04-06 |
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Michael Vogtmann, Chris Frederickson, Jeff Gasparitsch, Gene Hempel | 2003-11-11 |
| 6517418 | Method of transporting a semiconductor wafer in a wafer polishing system | Edward T. Ferri, Jr., Wilbur C. Krusell, Rahul Jairath | 2003-02-11 |
| 6500056 | Linear reciprocating disposable belt polishing method and apparatus | Wilbur C. Krusell, Glenn W. Travis, James Bagley | 2002-12-31 |
| 6428394 | Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed | Ben Mooring, Wilbur C. Krusell, Glenn W. Travis | 2002-08-06 |
| 6336845 | Method and apparatus for polishing semiconductor wafers | Edward T. Ferri, Jr., Wilbur C. Krusell, Rahul Jairath, Randall L. Green, Anil K. Pant | 2002-01-08 |
| 6261155 | Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher | Rahul Jairath, Jiri Pecen, Saket Chadda, Wilbur C. Krusell, Jerauld J. Cutini | 2001-07-17 |
| 6224461 | Method and apparatus for stabilizing the process temperature during chemical mechanical polishing | Robert G. Boehm, Jr., Anil K. Pant, Wilbur C. Krusell | 2001-05-01 |
| 6146248 | Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher | Rahul Jairath, Jiri Pecen, Saket Chadda, Wilbur C. Krusell, Jerauld J. Cutini | 2000-11-14 |
| 5762536 | Sensors for a linear polisher | Anil K. Pant, Joseph R. Breivogel, Douglas W. Young, Rahul Jairath | 1998-06-09 |
| 5618351 | Thermal processing apparatus and process | Terry A. Koble, Jr., Anthony Dip, Ian Roger Oliver, Christopher Ratliff | 1997-04-08 |