| 6746320 |
Linear reciprocating disposable belt polishing method and apparatus |
Wilbur C. Krusell, Erik H. Engdahl, James Bagley |
2004-06-08 |
| 6666756 |
Wafer carrier head assembly |
— |
2003-12-23 |
| 6659116 |
System for wafer carrier in-process clean and rinse |
Damon Vincent Williams |
2003-12-09 |
| 6505636 |
Apparatus for wafer carrier in-process clean and rinse |
— |
2003-01-14 |
| 6500056 |
Linear reciprocating disposable belt polishing method and apparatus |
Wilbur C. Krusell, Erik H. Engdahl, James Bagley |
2002-12-31 |
| 6486550 |
Locking mechanism for detachably securing a wafer carrier to a conveyor |
— |
2002-11-26 |
| 6428394 |
Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed |
Ben Mooring, Wilbur C. Krusell, Erik H. Engdahl |
2002-08-06 |
| 6425812 |
Polishing head for chemical mechanical polishing using linear planarization technology |
Anil K. Pant, Douglas W. Young, Konstantin Volodarsky, Andrew J. Nagengast |
2002-07-30 |
| 6409051 |
Method and apparatus for dispensing a fluid media |
— |
2002-06-25 |
| 6328637 |
Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization |
Michael Labunsky, Tac Huynh, Anthony Meyer, Andrew J. Nagengast |
2001-12-11 |
| 6261959 |
Method and apparatus for chemically-mechanically polishing semiconductor wafers |
Christopher Pena |
2001-07-17 |
| 6086460 |
Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization |
Michael Labunsky, Tac Huynh, Anthony Meyer, Andrew J. Nagengast |
2000-07-11 |
| 5536294 |
Process for extracting precious metals from volcanic ore |
Wayne L. Gill |
1996-07-16 |
| 4306477 |
Ticket dispenser |
— |
1981-12-22 |
