Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9793104 | Preparing a semiconductor surface for epitaxial deposition | Maxim Kelman, Shahab Khandan, Scott Dunham, Kenneth B. K. Teo | 2017-10-17 |
| 6328637 | Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization | Michael Labunsky, Anthony Meyer, Andrew J. Nagengast, Glenn W. Travis | 2001-12-11 |
| 6086460 | Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization | Michael Labunsky, Anthony Meyer, Andrew J. Nagengast, Glenn W. Travis | 2000-07-11 |
| 5822213 | Method and apparatus for determining the center and orientation of a wafer-like object | — | 1998-10-13 |