Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764086 | Wafer transport assembly with integrated buffers | David Trussell, John Daugherty, Michael C. Kellogg, Klay Kunkel, Richard H. Gould | 2023-09-19 |
| 11393705 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Michael C. Kellogg, Richard H. Gould, Klay Kunkel | 2022-07-19 |
| 10914003 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Michael C. Kellogg, John Daugherty | 2021-02-09 |
| 10790174 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Michael C. Kellogg, Richard H. Gould, Klay Kunkel | 2020-09-29 |
| 10557197 | Monolithic gas distribution manifold and various construction techniques and use cases therefor | Andrew C. Lee, Michael C. Kellogg, John Daugherty | 2020-02-11 |
| 10118263 | Monolithic manifold mask and substrate concepts | Michael C. Kellogg, Andrew C. Lee | 2018-11-06 |
| 10014196 | Wafer transport assembly with integrated buffers | John Daugherty, David Trussell, Michael C. Kellogg, Richard H. Gould, Klay Kunkel | 2018-07-03 |
| 9929028 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, John Daugherty, Michael C. Kellogg, Richard H. Gould, Klay Kunkel | 2018-03-27 |
| 9502275 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | David Trussell, John Daugherty, Michael C. Kellogg, Richard H. Gould, Klay Kunkel | 2016-11-22 |
| 8959704 | Debris collection devices | — | 2015-02-24 |
| 7735177 | Brush core assembly | Jeffrey Farber, Edward Orbeta | 2010-06-15 |
| 7192037 | Lid assembly and method of use | — | 2007-03-20 |
| 6907637 | Edge wheel assembly in a substrate processing brush box | — | 2005-06-21 |
| 6851151 | Brush drive assembly in a substrate processing brush box | — | 2005-02-08 |
| 6261959 | Method and apparatus for chemically-mechanically polishing semiconductor wafers | Glenn W. Travis | 2001-07-17 |