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2021-02-09 |
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John Daugherty, David Trussell, Michael C. Kellogg, Richard H. Gould, Klay Kunkel |
2020-09-29 |
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2020-02-11 |
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2018-11-06 |
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2018-07-03 |
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Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs |
David Trussell, John Daugherty, Michael C. Kellogg, Richard H. Gould, Klay Kunkel |
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Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs |
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2016-11-22 |
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— |
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2007-03-20 |
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— |
2005-06-21 |
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— |
2005-02-08 |
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