Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6729945 | Apparatus for controlling leading edge and trailing edge polishing | Cangshan Xu, Robert Taff, Kenneth J. Bahng, Paul H. Stasiewicz, Erik H. Engdahl | 2004-05-04 |
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Michael Vogtmann, Chris Frederickson, Gene Hempel, Erik H. Engdahl | 2003-11-11 |