Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8293016 | Apparatus for efficient removal of halogen residues from etched substrates | Matthew F. Davis, Travis Morey, James D. Carducci | 2012-10-23 |
| 7946759 | Substrate temperature measurement by infrared transmission | Matthew F. Davis | 2011-05-24 |
| 7846845 | Integrated method for removal of halogen residues from etched substrates in a processing system | Matthew F. Davis, Thorsten Lill, Steven H. Kim | 2010-12-07 |
| 6729945 | Apparatus for controlling leading edge and trailing edge polishing | Cangshan Xu, Jeff Gasparitsch, Robert Taff, Paul H. Stasiewicz, Erik H. Engdahl | 2004-05-04 |
| 5199483 | Method and apparatus for cooling wafers | — | 1993-04-06 |