Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Michael Vogtmann, Chris Frederickson, Jeff Gasparitsch, Erik H. Engdahl | 2003-11-11 |
| 6575816 | Dual purpose handoff station for workpiece polishing machine | Mike L. Bowman | 2003-06-10 |
| 6309279 | Arrangements for wafer polishing | Mike L. Bowman, Chris Karlsrud, Franklin D. Root | 2001-10-30 |
| 6290578 | Method for chemical mechanical polishing using synergistic geometric patterns | Mike L. Bowman, Tim Dyer, Craig Howard, Yushin Son | 2001-09-18 |
| 6244941 | Method and apparatus for pad removal and replacement | Mike L. Bowman | 2001-06-12 |
| 6227950 | Dual purpose handoff station for workpiece polishing machine | Mike L. Bowman | 2001-05-08 |