| 12183597 |
Fluid delivery system |
Randolph Treur, Stephen Carson |
2024-12-31 |
| 9393669 |
Systems and methods of processing substrates |
William J. Kalenian, Thomas A. Walsh, Benjamin C. Smedley, Larry Spiegel, Thomas E. Brake |
2016-07-19 |
| 8968052 |
Systems and methods of wafer grinding |
Thomas A. Walsh |
2015-03-03 |
| 8915771 |
Method and apparatus for cleaning grinding work chuck using a vacuum |
— |
2014-12-23 |
| 8520222 |
System and method for in situ monitoring of top wafer thickness in a stack of wafers |
Frederic Anthony Schraub, Benjamin C. Smedley |
2013-08-27 |
| 8133093 |
Grinding apparatus having an extendable wheel mount |
Thomas A. Walsh |
2012-03-13 |
| 7345466 |
Method and apparatus for cleaning a probe card |
Rolf Hagenlocher, Uday Nayak |
2008-03-18 |
| 6796881 |
Sensing the presence of a wafer |
Terry L. Lentz |
2004-09-28 |
| 6672943 |
Eccentric abrasive wheel for wafer processing |
Krishna Vepa, Michael S. Wisnieski |
2004-01-06 |
| 6645046 |
Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers |
Chris Frederickson, Jeff Gasparitsch, Gene Hempel, Erik H. Engdahl |
2003-11-11 |
| 6632012 |
Mixing manifold for multiple inlet chemistry fluids |
Michael S. Wisnieski |
2003-10-14 |
| 6505635 |
Lifting and rinsing a wafer |
Terry L. Lentz |
2003-01-14 |
| 6405740 |
Accurate positioning of a wafer |
Terry L. Lentz |
2002-06-18 |
| 6283827 |
Non-contacting support for a wafer |
Terry L. Lentz |
2001-09-04 |
| 6267642 |
Sensing the presence of a wafer |
Terry L. Lentz |
2001-07-31 |
| 6131589 |
Accurate positioning of a wafer |
Terry L. Lentz |
2000-10-17 |
| 6102057 |
Lifting and rinsing a wafer |
Terry L. Lentz |
2000-08-15 |
