Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183597 | Fluid delivery system | Randolph Treur, Stephen Carson | 2024-12-31 |
| 9393669 | Systems and methods of processing substrates | William J. Kalenian, Thomas A. Walsh, Benjamin C. Smedley, Larry Spiegel, Thomas E. Brake | 2016-07-19 |
| 8968052 | Systems and methods of wafer grinding | Thomas A. Walsh | 2015-03-03 |
| 8915771 | Method and apparatus for cleaning grinding work chuck using a vacuum | — | 2014-12-23 |
| 8520222 | System and method for in situ monitoring of top wafer thickness in a stack of wafers | Frederic Anthony Schraub, Benjamin C. Smedley | 2013-08-27 |
| 8133093 | Grinding apparatus having an extendable wheel mount | Thomas A. Walsh | 2012-03-13 |
| 7345466 | Method and apparatus for cleaning a probe card | Rolf Hagenlocher, Uday Nayak | 2008-03-18 |
| 6796881 | Sensing the presence of a wafer | Terry L. Lentz | 2004-09-28 |
| 6672943 | Eccentric abrasive wheel for wafer processing | Krishna Vepa, Michael S. Wisnieski | 2004-01-06 |
| 6645046 | Conditioning mechanism in a chemical mechanical polishing apparatus for semiconductor wafers | Chris Frederickson, Jeff Gasparitsch, Gene Hempel, Erik H. Engdahl | 2003-11-11 |
| 6632012 | Mixing manifold for multiple inlet chemistry fluids | Michael S. Wisnieski | 2003-10-14 |
| 6505635 | Lifting and rinsing a wafer | Terry L. Lentz | 2003-01-14 |
| 6405740 | Accurate positioning of a wafer | Terry L. Lentz | 2002-06-18 |
| 6283827 | Non-contacting support for a wafer | Terry L. Lentz | 2001-09-04 |
| 6267642 | Sensing the presence of a wafer | Terry L. Lentz | 2001-07-31 |
| 6131589 | Accurate positioning of a wafer | Terry L. Lentz | 2000-10-17 |
| 6102057 | Lifting and rinsing a wafer | Terry L. Lentz | 2000-08-15 |