Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9610669 | Methods and systems for use in grind spindle alignment | Thomas A. Walsh | 2017-04-04 |
| 9393669 | Systems and methods of processing substrates | William J. Kalenian, Thomas A. Walsh, Michael Vogtmann, Benjamin C. Smedley, Thomas E. Brake | 2016-07-19 |
| 9193030 | CMP retaining ring with soft retaining ring insert | William J. Kalenian | 2015-11-24 |
| 8740673 | CMP retaining ring with soft retaining ring insert | William J. Kalenian | 2014-06-03 |
| 7959496 | Flexible membrane assembly for a CMP system and method of using | — | 2011-06-14 |
| 7238083 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Carlton Wells, Bill Kalenian | 2007-07-03 |
| 7131892 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Carlton Wells, Bill Kalenian | 2006-11-07 |
| 7063604 | Independent edge control for CMP carriers | — | 2006-06-20 |
| 7063605 | Retaining ring for wafer carriers | — | 2006-06-20 |
| 7033252 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Carlton Wells, Bill Kalenian | 2006-04-25 |
| 7018268 | Protection of work piece during surface processing | Salman Kassir | 2006-03-28 |
| 6869348 | Retaining ring for wafer carriers | — | 2005-03-22 |