Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9610669 | Methods and systems for use in grind spindle alignment | Larry Spiegel | 2017-04-04 |
| 9393669 | Systems and methods of processing substrates | William J. Kalenian, Michael Vogtmann, Benjamin C. Smedley, Larry Spiegel, Thomas E. Brake | 2016-07-19 |
| 9082713 | Method of grinding wafer stacks to provide uniform residual silicon thickness | Thomas E. Brake | 2015-07-14 |
| 8968052 | Systems and methods of wafer grinding | Michael Vogtmann | 2015-03-03 |
| 8565919 | Method, apparatus and system for use in processing wafers | William J. Kalenian, Dave Halley | 2013-10-22 |
| 8133093 | Grinding apparatus having an extendable wheel mount | Michael Vogtmann | 2012-03-13 |
| 7458878 | Grinding apparatus and method | Salman Kassir | 2008-12-02 |
| 7156946 | Wafer carrier pivot mechanism | William J. Kalenian | 2007-01-02 |
| 7118446 | Grinding apparatus and method | Salman Kassir | 2006-10-10 |
| 7040955 | Chemical-mechanical planarization tool force calibration method and system | William J. Kalenian | 2006-05-09 |
| 6935934 | Parallel alignment method and apparatus for chemical mechanical polishing | — | 2005-08-30 |
| 6354926 | Parallel alignment method and apparatus for chemical mechanical polishing | — | 2002-03-12 |
| 6045716 | Chemical mechanical polishing apparatus and method | Dan Trojan | 2000-04-04 |
| 5964646 | Grinding process and apparatus for planarizing sawed wafers | Salman Kassir | 1999-10-12 |
| 5605487 | Semiconductor wafer polishing appartus and method | Harold J. Hileman, Robert J. Walsh | 1997-02-25 |
| 5240158 | Belt-type carrier device | — | 1993-08-31 |
| 4518114 | Dip soldering apparatus and method | — | 1985-05-21 |
| 4380412 | Lap shaping machine with oscillatable point cutter and selectively rotatable or oscillatable lap | — | 1983-04-19 |