Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9393669 | Systems and methods of processing substrates | William J. Kalenian, Thomas A. Walsh, Michael Vogtmann, Larry Spiegel, Thomas E. Brake | 2016-07-19 |
| 8520222 | System and method for in situ monitoring of top wafer thickness in a stack of wafers | Frederic Anthony Schraub, Michael Vogtmann | 2013-08-27 |