Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8520222 | System and method for in situ monitoring of top wafer thickness in a stack of wafers | Michael Vogtmann, Benjamin C. Smedley | 2013-08-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8520222 | System and method for in situ monitoring of top wafer thickness in a stack of wafers | Michael Vogtmann, Benjamin C. Smedley | 2013-08-27 |