Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9457446 | Methods and systems for use in grind shape control adaptation | Thomas E. Brake, David L. Grant | 2016-10-04 |
| 9393669 | Systems and methods of processing substrates | Thomas A. Walsh, Michael Vogtmann, Benjamin C. Smedley, Larry Spiegel, Thomas E. Brake | 2016-07-19 |
| 9193030 | CMP retaining ring with soft retaining ring insert | Larry Spiegel | 2015-11-24 |
| 8740673 | CMP retaining ring with soft retaining ring insert | Larry Spiegel | 2014-06-03 |
| 8565919 | Method, apparatus and system for use in processing wafers | Thomas A. Walsh, Dave Halley | 2013-10-22 |
| 8052504 | Method, apparatus and system for use in processing wafers | Tom Walsh, Dave Halley | 2011-11-08 |
| 7249992 | Method, apparatus and system for use in processing wafers | Tom Walsh | 2007-07-31 |
| 7156946 | Wafer carrier pivot mechanism | Thomas A. Walsh | 2007-01-02 |
| 7040955 | Chemical-mechanical planarization tool force calibration method and system | Thomas A. Walsh | 2006-05-09 |