Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7238083 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Carlton Wells, Larry Spiegel | 2007-07-03 |
| 7131892 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Carlton Wells, Larry Spiegel | 2006-11-07 |
| 7033252 | Wafer carrier with pressurized membrane and retaining ring actuator | John Fuhriman, Carlton Wells, Larry Spiegel | 2006-04-25 |
| 5961169 | Apparatus for sensing the presence of a wafer | Terry L. Lentz | 1999-10-05 |