Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6796881 | Sensing the presence of a wafer | Michael Vogtmann | 2004-09-28 |
| 6505635 | Lifting and rinsing a wafer | Michael Vogtmann | 2003-01-14 |
| 6405740 | Accurate positioning of a wafer | Michael Vogtmann | 2002-06-18 |
| 6283827 | Non-contacting support for a wafer | Michael Vogtmann | 2001-09-04 |
| 6267642 | Sensing the presence of a wafer | Michael Vogtmann | 2001-07-31 |
| 6131589 | Accurate positioning of a wafer | Michael Vogtmann | 2000-10-17 |
| 6102057 | Lifting and rinsing a wafer | Michael Vogtmann | 2000-08-15 |
| 5961169 | Apparatus for sensing the presence of a wafer | Bill Kalenian | 1999-10-05 |