Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7186629 | Protecting thin semiconductor wafers during back-grinding in high-volume production | Mark Wesselmann, Kostadin Petkov, Robert Howard Metter, John Boyd | 2007-03-06 |
| 6672943 | Eccentric abrasive wheel for wafer processing | Michael Vogtmann, Krishna Vepa | 2004-01-06 |
| 6632012 | Mixing manifold for multiple inlet chemistry fluids | Michael Vogtmann | 2003-10-14 |
| 5787595 | Method and apparatus for controlling flatness of polished semiconductor wafer | Ankur H. Desai, Troy W. Adcock, Harold Hall | 1998-08-04 |
| 5571373 | Method of rough polishing semiconductor wafers to reduce surface roughness | Vepa Krishna, Lois Illig | 1996-11-05 |
| 5422316 | Semiconductor wafer polisher and method | Ankur H. Desai, David Golland | 1995-06-06 |