Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8874416 | Process tool chemical and gas usage optimization | Parris Hawkins, Andreas Neuber | 2014-10-28 |
| 7951718 | Edge removal of silicon-on-insulator transfer wafer | Raymond John Donohoe, Paul V. Miller, Ronald Rayandayan, Hong Wang | 2011-05-31 |
| 7775856 | Method for removal of surface films from reclaim substrates | Yashraj Bhatnagar, Ronald Rayandayan | 2010-08-17 |
| 7727782 | Apparatus for improving incoming and outgoing wafer inspection productivity in a wafer reclaim factory | Yashraj Bhatnagar | 2010-06-01 |
| 7695982 | Refurbishing a wafer having a low-k dielectric layer | Hong Wang, Paul V. Miller | 2010-04-13 |
| 7659206 | Removal of silicon oxycarbide from substrates | Yashraj Bhatnagar, Ronald Rayandayan, Venkata R. Balagani | 2010-02-09 |
| 7657390 | Reclaiming substrates having defects and contaminants | Yashraj Bhatnagar, Ronald Rayandayan, Hong Wang | 2010-02-02 |
| 7402520 | Edge removal of silicon-on-insulator transfer wafer | Raymond John Donohoe, Paul V. Miller, Ronald Rayandayan, Hong Wang | 2008-07-22 |
| 7208325 | Refreshing wafers having low-k dielectric materials | Hong Wang, Paul V. Miller | 2007-04-24 |
| 6852012 | Cluster tool systems and methods for in fab wafer processing | Duncan Dobson | 2005-02-08 |
| 6672943 | Eccentric abrasive wheel for wafer processing | Michael Vogtmann, Michael S. Wisnieski | 2004-01-06 |