| 8874416 |
Process tool chemical and gas usage optimization |
Parris Hawkins, Andreas Neuber |
2014-10-28 |
| 7951718 |
Edge removal of silicon-on-insulator transfer wafer |
Raymond John Donohoe, Paul V. Miller, Ronald Rayandayan, Hong Wang |
2011-05-31 |
| 7775856 |
Method for removal of surface films from reclaim substrates |
Yashraj Bhatnagar, Ronald Rayandayan |
2010-08-17 |
| 7727782 |
Apparatus for improving incoming and outgoing wafer inspection productivity in a wafer reclaim factory |
Yashraj Bhatnagar |
2010-06-01 |
| 7695982 |
Refurbishing a wafer having a low-k dielectric layer |
Hong Wang, Paul V. Miller |
2010-04-13 |
| 7659206 |
Removal of silicon oxycarbide from substrates |
Yashraj Bhatnagar, Ronald Rayandayan, Venkata R. Balagani |
2010-02-09 |
| 7657390 |
Reclaiming substrates having defects and contaminants |
Yashraj Bhatnagar, Ronald Rayandayan, Hong Wang |
2010-02-02 |
| 7402520 |
Edge removal of silicon-on-insulator transfer wafer |
Raymond John Donohoe, Paul V. Miller, Ronald Rayandayan, Hong Wang |
2008-07-22 |
| 7208325 |
Refreshing wafers having low-k dielectric materials |
Hong Wang, Paul V. Miller |
2007-04-24 |
| 6852012 |
Cluster tool systems and methods for in fab wafer processing |
Duncan Dobson |
2005-02-08 |
| 6672943 |
Eccentric abrasive wheel for wafer processing |
Michael Vogtmann, Michael S. Wisnieski |
2004-01-06 |
