Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Accurate positioning of a wafer

Accurate positioning of a wafer

US Patent 6405740 · Granted Jun 18, 2002

Estimated economic value: $7,643,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Fluid delivery system2024
Systems and methods of processing substrates2016
Systems and methods of wafer grinding2015
Method and apparatus for cleaning grinding work chuck using a vacuum2014
System and method for in situ monitoring of top wafer thickness in a stack of wa2013
Grinding apparatus having an extendable wheel mount2012
Method and apparatus for cleaning a probe card2008
Sensing the presence of a wafer2004
Sensing the presence of a wafer2004
Eccentric abrasive wheel for wafer processing2004
Conditioning mechanism in a chemical mechanical polishing apparatus for semicond2003
Mixing manifold for multiple inlet chemistry fluids2003