Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6261155 | Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher | Rahul Jairath, Jiri Pecen, Saket Chadda, Wilbur C. Krusell, Erik H. Engdahl | 2001-07-17 |
| 6146248 | Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher | Rahul Jairath, Jiri Pecen, Saket Chadda, Wilbur C. Krusell, Erik H. Engdahl | 2000-11-14 |