Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716093 | Low friction gimbaled substrate holder for CMP apparatus | Erik H. Engdahl, Paul H. Stasiewicz | 2004-04-06 |
| 6641470 | Apparatus for accurate endpoint detection in supported polishing pads | Eugene Zhao, Kang Jia, Herbert E. Litvak, Christian D. Frederickson | 2003-11-04 |