Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641470 | Apparatus for accurate endpoint detection in supported polishing pads | Eugene Zhao, Michael D. Steiman, Herbert E. Litvak, Christian D. Frederickson | 2003-11-04 |
| 6149696 | Colloidal silica slurry for NiP plated disk polishing | — | 2000-11-21 |
| 6145849 | Disk processing chuck | Peter S. Bae, Stanley M. Smith, Warren C. Schroeder, Michael Edwin Slafter, Ronald Allen | 2000-11-14 |