Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6517418 | Method of transporting a semiconductor wafer in a wafer polishing system | Erik H. Engdahl, Wilbur C. Krusell, Rahul Jairath | 2003-02-11 |
| 6482325 | Apparatus and process for separation and recovery of liquid and slurry abrasives used for polishing | Gary L. Corlett, J. Tobin Geatz | 2002-11-19 |
| 6416385 | Method and apparatus for polishing semiconductor wafers | Randall L. Green, Anil K. Pant | 2002-07-09 |
| 6379538 | Apparatus for separation and recovery of liquid and slurry abrasives used for polishing | Gary L. Corlett, J. Tobin Geatz | 2002-04-30 |
| 6336845 | Method and apparatus for polishing semiconductor wafers | Erik H. Engdahl, Wilbur C. Krusell, Rahul Jairath, Randall L. Green, Anil K. Pant | 2002-01-08 |
| 6206227 | Closure assembly for pressure vessel | — | 2001-03-27 |
| 6085940 | Chemical dispensing system | — | 2000-07-11 |
| 5874049 | Two-stage chemical mixing system | J. Tobin Geatz, Randall L. Green | 1999-02-23 |
| 5803599 | Apparatus and method for mixing chemicals to be used in chemical-mechanical polishing procedures | J. Tobin Geatz, Gary L. Corlett | 1998-09-08 |
| 5632960 | Two-stage chemical mixing system | J. Tobin Geatz, Randall L. Green | 1997-05-27 |
| 5417346 | Process and apparatus for electronic control of the transfer and delivery of high purity chemicals | J. Tobin Geatz | 1995-05-23 |
| 5370269 | Process and apparatus for precise volumetric diluting/mixing of chemicals | Eugene W. Bernosky, J. Tobin Geatz, Glenn A. Roberson, Jr. | 1994-12-06 |
| 5330072 | Process and apparatus for electronic control of the transfer and delivery of high purity chemicals | J. Tobin Geatz | 1994-07-19 |
| 4608039 | Envelope folding system | Paul E. Seaborn | 1986-08-26 |