Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7064070 | Removal of CMP and post-CMP residue from semiconductors using supercritical carbon dioxide process | William H. Mullee, Marc de Leeuwe, Bentley J. Palmer | 2006-06-20 |
| 7044520 | Vibrating scoop basket | Glenn A. Roberson, III, Paul Domato | 2006-05-16 |
| 6537916 | Removal of CMP residue from semiconductor substrate using supercritical carbon dioxide process | William H. Mullee, Marc de Leeuwe | 2003-03-25 |
| 6368411 | Molecular contamination control system | Robert M. Genco, Robert B. Eglinton, Wayland Comer, Gregory K. Mundt | 2002-04-09 |
| 6277753 | Removal of CMP residue from semiconductors using supercritical carbon dioxide process | William H. Mullee, Marc de Leeuwe | 2001-08-21 |
| 6221163 | Molecular contamination control system | Robert M. Genco, Robert B. Eglinton, Wayland Comer, Gregory K. Mundt | 2001-04-24 |
| 6120371 | Docking and environmental purging system for integrated circuit wafer transport assemblies | Robert M. Genco, G. Kyle Mundt | 2000-09-19 |
| 6096185 | Method and apparatus for recovery of water and slurry abrasives used for chemical and mechanical planarization | Gary L. Corlett | 2000-08-01 |
| 6059712 | Apparatus for continuous separation of fine solid particles from a liquid by centrifugal force | Gary L. Corlett | 2000-05-09 |
| 6042651 | Molecular contamination control system | Robert M. Genco, Robert B. Eglinton, Wayland Comer, Gregory K. Mundt | 2000-03-28 |
| 5928492 | Method and apparatus for recovery of water and slurry abrasives used for chemical and mechanical planarization | Gary L. Corlett | 1999-07-27 |
| 5919124 | Apparatus for continuous separation of fine solid particles from a liquid by centrifugal force | Gary L. Corlett | 1999-07-06 |
| 5879458 | Molecular contamination control system | Robert M. Genco, Robert B. Eglinton, Wayland Comer, Gregory K. Mundt | 1999-03-09 |
| 5848933 | Docking and environmental purging system for integrated circuit wafer transport assemblies | Robert M. Genco, G. Kyle Mundt | 1998-12-15 |
| 5674123 | Docking and environmental purging system for integrated circuit wafer transport assemblies | Robert M. Genco, G. Kyle Mundt | 1997-10-07 |
| 5490611 | Process for precise volumetrio diluting/mixing of chemicals | Eugene W. Bernosky, J. Tobin Geatz, Edward T. Ferrie, Jr. | 1996-02-13 |
| 5370269 | Process and apparatus for precise volumetric diluting/mixing of chemicals | Eugene W. Bernosky, J. Tobin Geatz, Edward T. Ferri, Jr. | 1994-12-06 |
| 5315766 | Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol | Robert B. Eglinton | 1994-05-31 |
| 5115576 | Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol | Robert B. Eglinton | 1992-05-26 |
| 4977688 | Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol | Robert B. Eglinton | 1990-12-18 |