Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8841216 | Method and composition for chemical mechanical planarization of a metal | Xiaobo Shi, Rebecca A. Sawayda, Fadi Abdallah Coder, Victoria Perez | 2014-09-23 |
| 8697577 | Method and composition for chemical mechanical planarization of a metal or a metal alloy | Xiaobo Shi, Rebecca A. Sawayda | 2014-04-15 |
| 8506661 | Polishing slurry for copper films | Rebecca A. Sawayda | 2013-08-13 |
| 8414789 | Method and composition for chemical mechanical planarization of a metal | Xiaobo Shi, Rebecca A. Sawayda, Fadi Abdallah Coder, Victoria Perez | 2013-04-09 |
| 8252688 | Method and composition for chemical mechanical planarization of a metal or a metal alloy | Xiaobo Shi, Rebecca A. Sawayda | 2012-08-28 |
| 7678605 | Method for chemical mechanical planarization of chalcogenide materials | James Allen Schlueter | 2010-03-16 |
| 7307019 | Method for supercritical carbon dioxide processing of fluoro-carbon films | Kohei Kawamura, Akira Asano, Koutarou Miyatani, Joseph T. Hillman | 2007-12-11 |
| 7297239 | Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface | Ismail Emesh, Periya Gopalan, Phillip M. Rayer, II | 2007-11-20 |
| 7250374 | System and method for processing a substrate using supercritical carbon dioxide processing | Glenn W. Gale, Joseph T. Hillman, Gunilla Jacobson | 2007-07-31 |
| 7064070 | Removal of CMP and post-CMP residue from semiconductors using supercritical carbon dioxide process | William H. Mullee, Marc de Leeuwe, Glenn A. Roberson, Jr. | 2006-06-20 |
| 6924253 | Scale removal | Diankui Fu, Roger J. Card, Matthew J. Miller | 2005-08-02 |
| 6802955 | Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface | Ismail Emesh, Periya Gopalan, Phillip M. Rayer, II | 2004-10-12 |
| 6608005 | Wellbore fluids and their application | Diankui Fu, Roger J. Card, Edgar Volpert | 2003-08-19 |
| 6599863 | Fracturing process and composition | Jesse Lee | 2003-07-29 |
| 6419019 | Method to remove particulate matter from a wellbore using translocating fibers and/or platelets | Dean M. Willberg, Roger J. Card, J. Ernest Brown, Philip F. Sullivan | 2002-07-16 |
| 6085844 | Method for removal of undesired fluids from a wellbore | Dean M. Willberg, Patrick W. Bixenman, Philip F. Sullivan | 2000-07-11 |
| 5534312 | Method for directly depositing metal containing patterned films | Ross Hill, Alfred A. Avey, Jr., Sharon Blair, Chu Chu, Meihua Gao +1 more | 1996-07-09 |