Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7297239 | Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface | Ismail Emesh, Periya Gopalan, Bentley J. Palmer | 2007-11-20 |
| 6802955 | Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface | Ismail Emesh, Periya Gopalan, Bentley J. Palmer | 2004-10-12 |
| 6406362 | Seal for use with a chemical mechanical planarization apparatus | Andrew Michael Yednak, III | 2002-06-18 |
| 6241226 | Vacuum system coupled to a wafer chuck for holding wet wafers | Gregory A. Olsen, Christopher J. Lichner, Chad J. Voelkers | 2001-06-05 |