Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416081 | Manifolds for uniform vapor deposition | David Marquardt, Eric James Shero, Herbert Terhorst | 2025-09-16 |
| 12297540 | Chemical source vessel with dip tube | Todd Robert Dunn | 2025-05-13 |
| 12224190 | System and apparatus for a valve assembly | — | 2025-02-11 |
| 11988316 | Methods and apparatus for heating a liquid | — | 2024-05-21 |
| 11869782 | System and apparatus for a valve assembly | — | 2024-01-09 |
| 11781221 | Chemical source vessel with dip tube | Todd Robert Dunn | 2023-10-10 |
| 11680839 | Liquid level sensor for a chemical source vessel | — | 2023-06-20 |
| 9341296 | Heater jacket for a fluid line | Frederick L. Pettinger, Jr. | 2016-05-17 |
| 9096931 | Deposition valve assembly and method of heating the same | Todd Robert Dunn, Carl Louis White, Michael Manasco | 2015-08-04 |
| 6685537 | Polishing pad window for a chemical mechanical polishing tool | Clinton O. Fruitman, Mark Meloni, Periya Gopalan | 2004-02-03 |
| 6406362 | Seal for use with a chemical mechanical planarization apparatus | Phillip M. Rayer, II | 2002-06-18 |
| 6402602 | Rotary union for semiconductor wafer applications | John Garcia | 2002-06-11 |
| 6217410 | Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing | Paul Holzapfel, John Natalicio, Chad Goudie | 2001-04-17 |
| 5958148 | Method for cleaning workpiece surfaces and monitoring probes during workpiece processing | Paul Holzapfel, John Natalicio, Chad Goudie | 1999-09-28 |