Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406871 | Substrate susceptor using edge purging | Raj Singu, Carl Louis White, Herbert Terhorst, Eric James Shero, Bhushan Zope | 2025-09-02 |
| 12297540 | Chemical source vessel with dip tube | Andrew Michael Yednak, III | 2025-05-13 |
| 12278129 | Alignment fixture for a reactor system | Surojit Ganguli, Ankit Kimtee | 2025-04-15 |
| 12234552 | Semiconductor processing apparatus and methods for monitoring and controlling a semiconductor processing apparatus | Mohith Verghese, John Kevin Shugrue | 2025-02-25 |
| D1059311 | Reaction chamber base plate | Abhishek Mangoli, Ruchik Bhatt | 2025-01-28 |
| 12033885 | Channeled lift pin | Govindarajasekhar Singu, Dinkar Nandwana, Shankar Swaminathan, Bhushan Zope, Carl Louis White | 2024-07-09 |
| 11972969 | Laser alignment fixture for a reactor system | Surojit Ganguli, Ankit Kimtee | 2024-04-30 |
| 11830731 | Semiconductor deposition reactor manifolds | Dinkar Nandwana, Eric James Shero, Carl Louis White, William George Petro, Jereld Lee Winkler +1 more | 2023-11-28 |
| 11781221 | Chemical source vessel with dip tube | Andrew Michael Yednak, III | 2023-10-10 |
| 11742189 | Multi-zone reactor, system including the reactor, and method of using the same | Carl Louis White, Mohith Verghese, Eric James Shero | 2023-08-29 |
| 11629406 | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate | Mohith Verghese, John Kevin Shugrue | 2023-04-18 |
| 11626308 | Laser alignment fixture for a reactor system | Surojit Ganguli, Ankit Kimtee | 2023-04-11 |
| 11501956 | Semiconductor reaction chamber showerhead | Carl Louis White, Eric James Shero, Kyle Fondurulia | 2022-11-15 |
| 11492701 | Reactor manifolds | Dinkar Nandwana, Jereld Lee Winkler, Eric James Shero, Carl Louis White | 2022-11-08 |
| 11404302 | Substrate susceptor using edge purging | Raj Singu, Carl Louis White, Herbert Terhorst, Eric James Shero, Bhushan Zope | 2022-08-02 |
| 10832903 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Sokol Ibrani, Eric James Shero +2 more | 2020-11-10 |
| 10714315 | Semiconductor reaction chamber showerhead | Carl Louis White, Eric James Shero, Kyle Fondurulia | 2020-07-14 |
| 10683571 | Gas supply manifold and method of supplying gases to chamber using same | Lucian Jdira, Herbert Terhorst, Michael Halpin, Carl Louis White, Eric James Shero +3 more | 2020-06-16 |
| 10370761 | Pulsed valve manifold for atomic layer deposition | Carl Louis White, Mike Halpin, Eric James Shero, Herbert Terhorst, Jerry Winkler | 2019-08-06 |
| 10276355 | Multi-zone reactor, system including the reactor, and method of using the same | Carl Louis White, Mohith Verghese, Eric James Shero | 2019-04-30 |
| 9892908 | Process feed management for semiconductor substrate processing | Fred Pettinger, Carl Louis White, Dave Marquardt, Sokol Ibrani, Eric James Shero +2 more | 2018-02-13 |
| 9574268 | Pulsed valve manifold for atomic layer deposition | Carl Louis White, Mike Halpin, Eric James Shero, Herbert Terhorst, Jerry Winkler | 2017-02-21 |
| 9340874 | Chamber sealing member | Michael Halpin, Eric James Shero, Carl Louis White, Fred Alokozai, Jerry Winkler | 2016-05-17 |
| 9299595 | Susceptor heater and method of heating a substrate | Fred Alokozai, Jerry Winkler, Michael Halpin | 2016-03-29 |
| 9202727 | Susceptor heater shim | Carl Louis White, Michael Halpin, Eric James Shero, Jerry Winkler | 2015-12-01 |