Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406871 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Eric James Shero | 2025-09-02 |
| 12354877 | Vapor deposition of films comprising molybdenum | Eric Christopher Stevens, Shankar Swaminathan, Eric James Shero, Robert Brennan Milligan | 2025-07-08 |
| 12215416 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2025-02-04 |
| 12203166 | Apparatus and methods for performing an in-situ etch of reaction chambers with fluorine-based radicals | Amit Mishra, Shankar Swaminathan, Theodorus G.M. Oosterlaken | 2025-01-21 |
| 12033885 | Channeled lift pin | Govindarajasekhar Singu, Dinkar Nandwana, Todd Robert Dunn, Shankar Swaminathan, Carl Louis White | 2024-07-09 |
| 11946136 | Semiconductor processing device | Jereld Lee Winkler, Eric James Shero, Carl Louis White, Shankar Swaminathan | 2024-04-02 |
| 11908736 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Kiran Shrestha, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2024-02-20 |
| 11898242 | Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film | Eric Christopher Stevens, Shankar Swaminathan, Roghayyeh Lotfi, Mustafa Muhammad, Eric James Shero | 2024-02-13 |
| 11827978 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2023-11-28 |
| 11581220 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Kiran Shrestha, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2023-02-14 |
| 11404302 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Eric James Shero | 2022-08-02 |
| 11295980 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Kiran Shrestha, Shankar Swaminathan, Chiyu Zhu, Henri Jussila, Qi Xie | 2022-04-05 |
| 11286558 | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film | Eric Christopher Stevens, Shankar Swaminathan, Charles Dezelah, Qi Xie, Giuseppe Alessio Verni | 2022-03-29 |
| 10699946 | Method of enabling seamless cobalt gap-fill | Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2020-06-30 |
| 10269633 | Method of enabling seamless cobalt gap-fill | Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2019-04-23 |
| 10199230 | Methods for selective deposition of metal silicides via atomic layer deposition cycles | Seshadri Ganguli, Yixiong Yang, Xinyu Fu, Avgerinos V. Gelatos, Guoqiang Jian +1 more | 2019-02-05 |
| 10163656 | Methods for dry etching cobalt metal using fluorine radicals | Avgerinos V. Gelatos | 2018-12-25 |
| 9842769 | Method of enabling seamless cobalt gap-fill | Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2017-12-12 |
| 9685371 | Method of enabling seamless cobalt gap-fill | Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2017-06-20 |
| 9637819 | Methods for preferential growth of cobalt within substrate features | Avgerinos V. Gelatos | 2017-05-02 |
| 9528183 | Cobalt removal for chamber clean or pre-clean process | Kai Wu, Bo Zheng, Sang Ho Yu, Avgerinos V. Gelatos, Jeffrey W. Anthis +1 more | 2016-12-27 |
| 9378941 | Interface treatment of semiconductor surfaces with high density low energy plasma | Aneesh Nainani, Leonid Dorf, Shahid Rauf, Adam Brand, Mathew Abraham +1 more | 2016-06-28 |
| 9330939 | Method of enabling seamless cobalt gap-fill | Avgerinos V. Gelatos, Bo Zheng, Yu Lei, Xinyu Fu, Srinivas Gandikota +2 more | 2016-05-03 |
| 9218980 | Surface treatment to improve CCTBA based CVD co nucleation on dielectric substrate | Avgerinos V. Gelatos | 2015-12-22 |