Issued Patents All Time
Showing 1–25 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359315 | Deposition of oxides and nitrides | Henri Jussila, Qi Xie, Jiyeon Kim, Tom E. Blomberg | 2025-07-15 |
| 12354872 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Tom E. Blomberg | 2025-07-08 |
| 12320012 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2025-06-03 |
| 12312696 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2025-05-27 |
| 12283520 | Selective deposition method to form air gaps | — | 2025-04-22 |
| 12237392 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2025-02-25 |
| 12217954 | Method of cleaning a surface | Shaoren Deng, Andrea Illiberi, Daniele Chiappe, Eva Tois, Giuseppe Alessio Verni +8 more | 2025-02-04 |
| 12166099 | Methods for forming a semiconductor device structure and related semiconductor device structures | Kiran Shrestha, Petri Raisanen, Michael Eugene Givens | 2024-12-10 |
| 12129545 | Precursor capsule, a vessel and a method | Jaakko Anttila | 2024-10-29 |
| 12119228 | Deposition method | Henri Jussila, Qi Xie | 2024-10-15 |
| 12094686 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2024-09-17 |
| 11908736 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Shankar Swaminathan, Henri Jussila, Qi Xie | 2024-02-20 |
| 11854876 | Systems and methods for cobalt metalization | Shinya Iwashita, Jan Willem Maes, Jiyeon Kim | 2023-12-26 |
| 11749562 | Selective deposition method to form air gaps | — | 2023-09-05 |
| 11739428 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2023-08-29 |
| 11739427 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2023-08-29 |
| 11695054 | Methods for forming a semiconductor device structure and related semiconductor device structures | Kiran Shrestha, Petri Raisanen, Michael Eugene Givens | 2023-07-04 |
| 11658030 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Tom E. Blomberg | 2023-05-23 |
| 11640899 | Atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2023-05-02 |
| 11581220 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Shankar Swaminathan, Henri Jussila, Qi Xie | 2023-02-14 |
| 11447854 | Process for film deposition on a substrate with non-uniform overlapping subpulses of a precursor | — | 2022-09-20 |
| 11393690 | Deposition method | Henri Jussila, Qi Xie | 2022-07-19 |
| 11295980 | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures | Bhushan Zope, Kiran Shrestha, Shankar Swaminathan, Henri Jussila, Qi Xie | 2022-04-05 |
| 11230769 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2022-01-25 |
| 11233133 | NbMC layers | Timo Asikainen, Robert Brennan Milligan | 2022-01-25 |