Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237392 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2025-02-25 |
| 11233133 | NbMC layers | Chiyu Zhu, Robert Brennan Milligan | 2022-01-25 |
| 11139383 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2021-10-05 |
| 10903113 | Selective deposition of aluminum and nitrogen containing material | Han Wang, Qi Xie, Delphine Longrie, Jan Willem Maes, David Kurt de Roest +4 more | 2021-01-26 |
| 10847361 | Selective deposition of aluminum and nitrogen containing material | Han Wang, Qi Xie, Delphine Longrie, Jan Willem Maes, David Kurt de Roest +2 more | 2020-11-24 |
| 10636889 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2020-04-28 |
| 10566185 | Selective deposition of aluminum and nitrogen containing material | Han Wang, Qi Xie, Delphine Longrie, Jan Willem Maes, David Kurt de Roest +2 more | 2020-02-18 |
| 10553482 | Selective deposition of aluminum and nitrogen containing material | Han Wang, Qi Xie, Delphine Longrie, Jan Willem Maes, David Kurt de Roest +4 more | 2020-02-04 |
| 10211308 | NbMC layers | Chiyu Zhu, Robert Brennan Milligan | 2019-02-19 |
| 10121699 | Selective deposition of aluminum and nitrogen containing material | Han Wang, Qi Xie, Delphine Longrie, Jan Willem Maes, David Kurt de Roest +4 more | 2018-11-06 |
| 10002936 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2018-06-19 |
| 7476420 | Process for producing metal oxide films at low temperatures | Jarmo Skarp, Mervi Linnermo | 2009-01-13 |
| 6884465 | Process for producing aluminum oxide films at low temperatures | Jarmo Skarp, Mervi Linnermo | 2005-04-26 |
| 6743475 | Process for producing aluminum oxide films at low temperatures | Jarmo Skarp, Mervi Linnermo | 2004-06-01 |