Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237392 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2025-02-25 |
| 12129545 | Precursor capsule, a vessel and a method | Chiyu Zhu | 2024-10-29 |
| 11646194 | Methods for forming silicon nitride thin films | Antti Niskanen, Suvi Haukka | 2023-05-09 |
| 11421321 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Raija H. Matero +2 more | 2022-08-23 |
| 11139383 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2021-10-05 |
| 11062914 | Removal of surface passivation | Antti Niskanen | 2021-07-13 |
| 10741411 | Removal of surface passivation | Antti Niskanen | 2020-08-11 |
| 10636889 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2020-04-28 |
| 10573511 | Methods for forming silicon nitride thin films | Antti Niskanen, Suvi Haukka | 2020-02-25 |
| 10115603 | Removal of surface passivation | Antti Niskanen | 2018-10-30 |
| 10074541 | Deposition of smooth metal nitride films | Tom E. Blomberg | 2018-09-11 |
| 10002936 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2018-06-19 |
| 9704716 | Deposition of smooth metal nitride films | Tom E. Blomberg | 2017-07-11 |
| 9490145 | Removal of surface passivation | Antti Niskanen | 2016-11-08 |
| 9412602 | Deposition of smooth metal nitride films | Tom E. Blomberg | 2016-08-09 |