Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170197 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Elina Färm, Delphine Longrie, Hidemi Suemori +5 more | 2024-12-17 |
| 12154785 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Eva Tois, Hidemi Suemori, Antti Niskanen +2 more | 2024-11-26 |
| 12080548 | Selective deposition using hydrophobic precursors | Elina Färm, Hidemi Suemori, Antti Niskanen, Suvi Haukka, Eva Tois | 2024-09-03 |
| 12024772 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Hidemi Suemori +2 more | 2024-07-02 |
| 11975357 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2024-05-07 |
| 11525184 | Dual selective deposition | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2022-12-13 |
| 11430656 | Deposition of oxide thin films | Suvi Haukka, Elina Färm, Eva Tois, Hidemi Suemori, Antti Niskanen +2 more | 2022-08-30 |
| 11421321 | Apparatuses for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Hidemi Suemori +2 more | 2022-08-23 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2022-01-04 |
| 11174550 | Selective deposition on metal or metallic surfaces relative to dielectric surfaces | Suvi Haukka, Elina Färm, Tom E. Blomberg | 2021-11-16 |
| 11094535 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Elina Färm, Delphine Longrie, Hidemi Suemori +5 more | 2021-08-17 |
| 11081342 | Selective deposition using hydrophobic precursors | Elina Färm, Hidemi Suemori, Antti Niskanen, Suvi Haukka, Eva Tois | 2021-08-03 |
| 11047040 | Dual selective deposition | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2021-06-29 |
| 10811249 | Atomic layer deposition of GeO2 | — | 2020-10-20 |
| 10741388 | Cyclical deposition of germanium | — | 2020-08-11 |
| 10699899 | Atomic layer deposition of antimony oxide films | Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2020-06-30 |
| 10553423 | Atomic layer deposition of GeO2 | — | 2020-02-04 |
| 10456808 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2019-10-29 |
| 10443123 | Dual selective deposition | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2019-10-15 |
| 10428421 | Selective deposition on metal or metallic surfaces relative to dielectric surfaces | Suvi Haukka, Elina Färm, Tom E. Blomberg | 2019-10-01 |
| 10204790 | Methods for thin film deposition | Jun Kawahara, Suvi Haukka, Antti Niskanen, Eva Tois, Hidemi Suemori +2 more | 2019-02-12 |
| 10056249 | Atomic layer deposition of antimony oxide films | Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2018-08-21 |
| 10047435 | Dual selective deposition | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +1 more | 2018-08-14 |
| 9929009 | Cyclical deposition of germanium | — | 2018-03-27 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Eva Tois, Antti Niskanen, Marko Tuominen, Hannu Huotari +2 more | 2018-02-20 |