Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576794 | Cyclical deposition of germanium | — | 2017-02-21 |
| 9514934 | Atomic layer deposition of antimony oxide films | Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2016-12-06 |
| 9218963 | Cyclical deposition of germanium | — | 2015-12-22 |
| 9171715 | Atomic layer deposition of GeO2 | — | 2015-10-27 |
| 9023427 | Methods for forming multi-component thin films | Tom E. Blomberg | 2015-05-05 |
| 9006112 | Atomic layer deposition of antimony oxide films | Linda Lindroos, Hessel Sprey, Jan Willem Maes, David Kurt de Roest, Dieter Pierreux +3 more | 2015-04-14 |
| 8685165 | Metal oxide films | Antti Rahtu, Markku Leskelä, Mikko Ritala, Timo Hatanpää, Timo Hanninen +1 more | 2014-04-01 |
| 8501637 | Silicon dioxide thin films by ALD | Suvi Haukka | 2013-08-06 |