Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11155919 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2021-10-26 |
| 10964534 | Enhanced thin film deposition | Eva Tois, Kai-Erik Elers, Wei Li | 2021-03-30 |
| 10297444 | Enhanced thin film deposition | Eva Tois, Kai-Erik Elers, Wei Li | 2019-05-21 |
| 10294563 | ALD of hafnium-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2019-05-21 |
| 9850575 | ALD of metal-containing films using cyclopentadienly compounds | Sean T. Barry, Yamile A.M. Wasslen | 2017-12-26 |
| 9831094 | Enhanced thin film deposition | Eva Tois, Kai-Erik Elers, Wei Li | 2017-11-28 |
| 9677175 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2017-06-13 |
| 9670582 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2017-06-06 |
| 9587307 | Enhanced deposition of noble metals | Suvi Haukka, Marko Tuominen | 2017-03-07 |
| 9273391 | ALD of zirconium-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2016-03-01 |
| 9127351 | Enhanced thin film deposition | Eva Tois, Kai-Erik Elers, Wei Li | 2015-09-08 |
| 8993055 | Enhanced thin film deposition | Eva Tois, Kai-Erik Elers, Wei Li | 2015-03-31 |
| 8795771 | ALD of metal-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2014-08-05 |
| 8685165 | Metal oxide films | Raija H. Matero, Markku Leskelä, Mikko Ritala, Timo Hatanpää, Timo Hanninen +1 more | 2014-04-01 |
| 8501275 | Enhanced deposition of noble metals | Suvi Haukka, Marko Tuominen | 2013-08-06 |
| 8048484 | Method for the deposition of a film by CVD or ALD | — | 2011-11-01 |
| 8025922 | Enhanced deposition of noble metals | Suvi Haukka, Marko Tuominen | 2011-09-27 |
| 7704896 | Atomic layer deposition of thin films on germanium | Suvi Haukka, Marko Tuominen | 2010-04-27 |
| 7377976 | Method for growing thin oxide films | Mikko Ritala, Markku Leskelä, Kaupo Kukli | 2008-05-27 |
| 6932867 | Method for growing thin oxide films | Mikko Ritala, Markku Leskelä, Kaupo Kukli | 2005-08-23 |
| 6632279 | Method for growing thin oxide films | Mikko Ritala, Markku Leskelä, Kaupo Kukli | 2003-10-14 |