Issued Patents All Time
Showing 1–25 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964534 | Enhanced thin film deposition | Antti Rahtu, Eva Tois, Wei Li | 2021-03-30 |
| 10297444 | Enhanced thin film deposition | Antti Rahtu, Eva Tois, Wei Li | 2019-05-21 |
| 10139313 | Capacitive cylinder pressure sensor | Teuvo Sillanpää, Panu Koppinen | 2018-11-27 |
| 9831094 | Enhanced thin film deposition | Antti Rahtu, Eva Tois, Wei Li | 2017-11-28 |
| 9217200 | Modification of nanoimprint lithography templates by atomic layer deposition | Suvi Haukka | 2015-12-22 |
| 9127351 | Enhanced thin film deposition | Antti Rahtu, Eva Tois, Wei Li | 2015-09-08 |
| 8993055 | Enhanced thin film deposition | Antti Rahtu, Eva Tois, Wei Li | 2015-03-31 |
| 8809195 | Etching high-k materials | — | 2014-08-19 |
| 8536058 | Method of growing electrical conductors | Juhana Kostamo, Pekka Soininen, Suvi Haukka | 2013-09-17 |
| 8334218 | Method of forming non-conformal layers | Sebastian E. Van Nooten, Jan Willem Maes, Steven Marcus, Glen Wilk, Petri Raisanen | 2012-12-18 |
| 8268409 | Plasma-enhanced deposition of metal carbide films | Glen Wilk, Steven Marcus | 2012-09-18 |
| 7955979 | Method of growing electrical conductors | Juhana Kostamo, Pekka Soininen, Suvi Haukka | 2011-06-07 |
| 7749871 | Method for depositing nanolaminate thin films on sensitive surfaces | Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2010-07-06 |
| 7727864 | Controlled composition using plasma-enhanced atomic layer deposition | — | 2010-06-01 |
| 7670944 | Conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Ernst H. A. Granneman | 2010-03-02 |
| 7611751 | Vapor deposition of metal carbide films | — | 2009-11-03 |
| 7608549 | Method of forming non-conformal layers | Sebastian E. Van Nooten, Jan Willem Maes, Steven Marcus, Glen Wilk, Petri Raisanen | 2009-10-27 |
| 7598170 | Plasma-enhanced ALD of tantalum nitride films | — | 2009-10-06 |
| 7595270 | Passivated stoichiometric metal nitride films | Steven Marcus | 2009-09-29 |
| 7494927 | Method of growing electrical conductors | Juhana Kostamo, Pekka Soininen, Suvi Haukka | 2009-02-24 |
| 7485340 | Production of elemental films using a boron-containing reducing agent | Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2009-02-03 |
| 7465658 | Oxygen bridge structures and methods to form oxygen bridge structures | Ivo Raaijmakers, Pekka Soininen | 2008-12-16 |
| 7410666 | Metal nitride carbide deposition by ALD | Wei Li | 2008-08-12 |
| 7329590 | Method for depositing nanolaminate thin films on sensitive surfaces | Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2008-02-12 |
| 7241677 | Process for producing integrated circuits including reduction using gaseous organic compounds | Pekka Soininen | 2007-07-10 |