Issued Patents All Time
Showing 26–50 of 50 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7144809 | Production of elemental films using a boron-containing reducing agent | Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2006-12-05 |
| 7102235 | Conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Yille A. Saanila, Pekka Soininen, Ernst H. A. Granneman | 2006-09-05 |
| 7034397 | Oxygen bridge structures and methods to form oxygen bridge structures | Ivo Raaijmakers, Pekka Soininen | 2006-04-25 |
| 7018917 | Multilayer metallization | — | 2006-03-28 |
| 6986914 | Metal nitride deposition by ALD with reduction pulse | Wei Li | 2006-01-17 |
| 6921712 | Process for producing integrated circuits including reduction using gaseous organic compounds | Pekka Soininen | 2005-07-26 |
| 6902763 | Method for depositing nanolaminate thin films on sensitive surfaces | Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2005-06-07 |
| 6887795 | Method of growing electrical conductors | Pekka Soininen, Suvi Haukka | 2005-05-03 |
| 6878628 | In situ reduction of copper oxide prior to silicon carbide deposition | Auguste Sophie, Hessel Sprey, Pekka Soininen | 2005-04-12 |
| 6863727 | Method of depositing transition metal nitride thin films | Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2005-03-08 |
| 6852635 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2005-02-08 |
| 6821889 | Production of elemental thin films using a boron-containing reducing agent | Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2004-11-23 |
| 6820570 | Atomic layer deposition reactor | Olli Kilpela, Ville Antero Saanila, Wei Li, Juhana Kostamo, Ivo Raaijmakers +1 more | 2004-11-23 |
| 6800552 | Deposition of transition metal carbides | Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2004-10-05 |
| 6794287 | Process for growing metal or metal carbide thin films utilizing boron-containing reducing agents | Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2004-09-21 |
| 6767582 | Method of modifying source chemicals in an ald process | — | 2004-07-27 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka, Marko Tuominen +3 more | 2004-07-06 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Ernst H. A. Granneman | 2004-04-27 |
| 6679951 | Metal anneal with oxidation prevention | Pekka Soininen, Ernst H. A. Granneman | 2004-01-20 |
| 6664192 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2003-12-16 |
| 6599572 | Process for growing metalloid thin films utilizing boron-containing reducing agents | Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2003-07-29 |
| 6482262 | Deposition of transition metal carbides | Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2002-11-19 |
| 6482740 | Method of growing electrical conductors by reducing metal oxide film with organic compound containing -OH, -CHO, or -COOH | Pekka Soininen, Suvi Haukka | 2002-11-19 |
| 6475276 | Production of elemental thin films using a boron-containing reducing agent | Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2002-11-05 |
| 6391785 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2002-05-21 |