Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7476618 | Selective formation of metal layers in an integrated circuit | Wonyong Koh, Hannu Huotari, Marko Tuominen, Miika Leinikka | 2009-01-13 |
| 6820570 | Atomic layer deposition reactor | Ville Antero Saanila, Wei Li, Kai-Erik Elers, Juhana Kostamo, Ivo Raaijmakers +1 more | 2004-11-23 |