Issued Patents All Time
Showing 1–25 of 120 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322593 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Shaoren Deng +4 more | 2025-06-03 |
| 12170197 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2024-12-17 |
| 12169361 | Substrate processing apparatus and method | Daniele Piumi, Ivan Zyulkov, David Kurt de Roest, Michael Eugene Givens | 2024-12-17 |
| 11975357 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2024-05-07 |
| 11970766 | Sequential infiltration synthesis apparatus | Jan Willem Maes, Werner Knaepen, Krzysztof Kamil Kachel | 2024-04-30 |
| 11830732 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Shaoren Deng +4 more | 2023-11-28 |
| 11581186 | Sequential infiltration synthesis apparatus | Jan Willem Maes, Werner Knaepen, Krzysztof Kamil Kachel | 2023-02-14 |
| 11213853 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2022-01-04 |
| 11145506 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Suvi Haukka, Vamsi K. Paruchuri, Shaoren Deng +3 more | 2021-10-12 |
| 11094535 | Selective passivation and selective deposition | Eva Tois, Suvi Haukka, Raija H. Matero, Elina Färm, Delphine Longrie +5 more | 2021-08-17 |
| 10456808 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2019-10-29 |
| 9895715 | Selective deposition of metals, metal oxides, and dielectrics | Suvi Haukka, Raija H. Matero, Eva Tois, Antti Niskanen, Marko Tuominen +2 more | 2018-02-20 |
| 9023737 | Method for forming conformal, homogeneous dielectric film by cyclic deposition and heat treatment | Julien Beynet, Atsuki Fukazawa | 2015-05-05 |
| 8530340 | Epitaxial semiconductor deposition methods and structures | Paul Brabant, Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Matthias Bauer | 2013-09-10 |
| 8343583 | Method for vaporizing non-gaseous precursor in a fluidized bed | Gert Jan Snijders | 2013-01-01 |
| 8317921 | In situ growth of oxide and silicon layers | Armand P. Ferro, Derrick W. Foster | 2012-11-27 |
| 8293597 | Selective silicide process | — | 2012-10-23 |
| 7981791 | Thin films | Suvi Haukka, Wei Li, Juhana Kostamo, Hessel Sprey, Christiaan J. Werkhoven | 2011-07-19 |
| 7927942 | Selective silicide process | — | 2011-04-19 |
| 7921805 | Deposition from liquid sources | Michael A. Todd | 2011-04-12 |
| 7893433 | Thin films and methods of making them | Michael A. Todd | 2011-02-22 |
| 7732331 | Copper interconnect structure having stuffed diffusion barrier | Ki Bum Kim, Pekka Soininen | 2010-06-08 |
| 7682947 | Epitaxial semiconductor deposition methods and structures | Paul Brabant, Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Matthias Bauer | 2010-03-23 |
| 7674728 | Deposition from liquid sources | Michael A. Todd | 2010-03-09 |
| 7670944 | Conformal lining layers for damascene metallization | Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Kai-Erik Elers, Ernst H. A. Granneman | 2010-03-02 |