Issued Patents All Time
Showing 26–50 of 120 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7465658 | Oxygen bridge structures and methods to form oxygen bridge structures | Pekka Soininen, Kai-Erik Elers | 2008-12-16 |
| 7452757 | Silicon-on-insulator structures and methods | Christiaan J. Werkhoven, Chantal Arena | 2008-11-18 |
| 7431767 | Apparatus and method for growth of a thin film | — | 2008-10-07 |
| 7419903 | Thin films | Suvi Haukka, Wei Li, Juhana Kostamo, Hessel Sprey | 2008-09-02 |
| 7402504 | Epitaxial semiconductor deposition methods and structures | Paul Brabant, Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Matthias Bauer | 2008-07-22 |
| 7323422 | Dielectric layers and methods of forming the same | Pekka Soininen, Jan Willem Maes | 2008-01-29 |
| 7285500 | Thin films and methods of making them | Michael A. Todd | 2007-10-23 |
| 7276774 | Trench isolation structures for integrated circuits | Pekka Soininen, Ernst H. A. Granneman | 2007-10-02 |
| 7253084 | Deposition from liquid sources | Michael A. Todd | 2007-08-07 |
| 7248931 | Semiconductor wafer position shift measurement and correction | — | 2007-07-24 |
| 7238595 | Epitaxial semiconductor deposition methods and structures | Paul Brabant, Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Matthias Bauer | 2007-07-03 |
| 7231141 | High temperature drop-off of a substrate | Paul Jacobson, Ravinder Aggarwal, Robert C. Haro | 2007-06-12 |
| 7220669 | Thin films for magnetic device | Juha Hujanen | 2007-05-22 |
| 7141499 | Apparatus and method for growth of a thin film | — | 2006-11-28 |
| 7115521 | Epitaxial semiconductor deposition methods and structures | Paul Brabant, Joseph P. Italiano, Chantal Arena, Pierre Tomasini, Matthias Bauer | 2006-10-03 |
| 7112538 | In situ growth of oxide and silicon layers | Armand P. Ferro, Derrick W. Foster | 2006-09-26 |
| 7105055 | In situ growth of oxide and silicon layers | Armand P. Ferro, Derrick W. Foster | 2006-09-12 |
| 7102235 | Conformal lining layers for damascene metallization | Suvi Haukka, Yille A. Saanila, Pekka Soininen, Kai-Erik Elers, Ernst H. A. Granneman | 2006-09-05 |
| 7060132 | Method and apparatus of growing a thin film | Sven Lindfors | 2006-06-13 |
| 7034397 | Oxygen bridge structures and methods to form oxygen bridge structures | Pekka Soininen, Kai-Erik Elers | 2006-04-25 |
| 7030401 | Modular substrate measurement system | Michael Abraham, Alain Gaudon, Pierre Astegno | 2006-04-18 |
| 7018504 | Loadlock with integrated pre-clean chamber | Ravinder Aggarwal, James Kusbel | 2006-03-28 |
| 6962859 | Thin films and method of making them | Michael A. Todd | 2005-11-08 |
| 6957690 | Apparatus for thermal treatment of substrates | — | 2005-10-25 |
| 6936535 | Copper interconnect structure having stuffed diffusion barrier | Ki Bum Kim, Pekka Soininen | 2005-08-30 |