Issued Patents All Time
Showing 76–100 of 120 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6511539 | Apparatus and method for growth of a thin film | — | 2003-01-28 |
| 6500742 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Karl A. Littau +1 more | 2002-12-31 |
| 6492283 | Method of forming ultrathin oxide layer | Yong-Bae Kim, Marko Tuominen, Suvi Haukka | 2002-12-10 |
| 6482733 | Protective layers prior to alternating layer deposition | Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka | 2002-11-19 |
| 6454865 | Low mass wafer support system | Matthew G. Goodman, Loren Jacobs, Franciscus Bernardus Maria Van Bilsen, Michael J. Meyer, Eric Barrett | 2002-09-24 |
| 6444036 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Karl A. Littau +1 more | 2002-09-03 |
| 6435809 | Dual arm linear hand-off wafer transfer assembly | Dennis L. Goodwin, Eric Wood | 2002-08-20 |
| 6435799 | Wafer transfer arm stop | Dennis L. Goodwin, Eric Wood | 2002-08-20 |
| 6420864 | Modular substrate measurement system | Michael Abraham, Alain Gaudon, Pierre Astegno | 2002-07-16 |
| 6383330 | Quartz wafer processing chamber | — | 2002-05-07 |
| 6368051 | Multi-position load lock chamber | — | 2002-04-09 |
| 6354791 | Water lift mechanism with electrostatic pickup and method for transferring a workpiece | Joe Wytman | 2002-03-12 |
| 6348420 | Situ dielectric stacks | Chris Werkhoven | 2002-02-19 |
| 6340415 | Method and apparatus for enhancing a sputtering target's lifetime | Robert S. Busacca, John W. Lane | 2002-01-22 |
| 6325858 | Long life high temperature process chamber | John F. Wengert, Mike Halpin, Loren Jacobs, Michael J. Meyer, Frank B. M. Van Bilsen +4 more | 2001-12-04 |
| 6318957 | Method for handling of wafers with minimal contact | Paul R. Carr, Paul Jacobson, James Kusbel, James S. Roundy, Ravinder Aggarwal +2 more | 2001-11-20 |
| 6293749 | Substrate transfer system for semiconductor processing equipment | Loren Jacobs, Michael Halpin, James A. Alexander, Ken O'Neill, Dennis L. Goodwin | 2001-09-25 |
| 6284048 | Method of processing wafers with low mass support | Franciscus Bernardus Maria Van Bilsen, Jason Layton | 2001-09-04 |
| 6263587 | Degassing method using simultaneous dry gas flux pressure and vacuum | Dan Marohl | 2001-07-24 |
| 6264812 | Method and apparatus for generating a plasma | Bradley O. Stimson, John C. Forster | 2001-07-24 |
| 6251758 | Construction of a film on a semiconductor wafer | Chyi Chern, Michal Danek, Marvin Liao, Roderick C. Mosely, Karl A. Littau +1 more | 2001-06-26 |
| 6242718 | Wafer holder | Armand P. Ferro, Ravinder Aggarwal, Ronald R. Stevens | 2001-06-05 |
| 6232196 | Method of depositing silicon with high step coverage | Christopher François Lilian Pomarede, Cornelius Alexander van der Jengd, Alexander Gschwandtner, Andreas Grassl | 2001-05-15 |
| 6228229 | Method and apparatus for generating a plasma | Bradley O. Stimson, John C. Forster | 2001-05-08 |
| 6209220 | Apparatus for cooling substrates | — | 2001-04-03 |