Issued Patents All Time
Showing 51–75 of 120 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933225 | Graded thin films | Christiaan J. Werkhoven, Suvi Haukka | 2005-08-23 |
| 6924463 | Pyrometer calibrated wafer temperature estimator | James Donald | 2005-08-02 |
| 6900877 | Semiconductor wafer position shift measurement and correction | — | 2005-05-31 |
| 6893507 | Self-centering wafer support system | Matthew G. Goodman, Loren Jacobs, Franciscus Bernardus Maria Van Bilsen, Michael J. Meyer, Eric Barrett | 2005-05-17 |
| 6861334 | Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition | Pekka Soininen, Ernst H. A. Granneman | 2005-03-01 |
| 6831315 | Conformal thin films over textured capacitor electrodes | Suvi Haukka, Ernst H. A. Granneman | 2004-12-14 |
| 6820570 | Atomic layer deposition reactor | Olli Kilpela, Ville Antero Saanila, Wei Li, Kai-Erik Elers, Juhana Kostamo +1 more | 2004-11-23 |
| 6794314 | Method of forming ultrathin oxide layer | Yong-Bae Kim, Marko Tuominen, Suvi Haukka | 2004-09-21 |
| 6780704 | Conformal thin films over textured capacitor electrodes | Suvi Haukka, Ernst H. A. Granneman | 2004-08-24 |
| 6764546 | Apparatus and method for growth of a thin film | — | 2004-07-20 |
| 6759325 | Sealing porous structures | Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka, Kai-Erik Elers, Marko Tuominen +3 more | 2004-07-06 |
| 6749687 | In situ growth of oxide and silicon layers | Armand P. Ferro, Derrick W. Foster | 2004-06-15 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Kai-Erik Elers, Ernst H. A. Granneman | 2004-04-27 |
| 6720531 | Light scattering process chamber walls | Paul Jacobson | 2004-04-13 |
| 6708700 | Cleaning of semiconductor processing chambers | Franciscus Bernardus Maria Van Bilsen | 2004-03-23 |
| 6704496 | High temperature drop-off of a substrate | Paul Jacobson, Ravinder Aggarwal, Robert C. Haro | 2004-03-09 |
| 6703708 | Graded thin films | Christiaan J. Werkhoven, Suvi Haukka | 2004-03-09 |
| 6699783 | Method for controlling conformality with alternating layer deposition | Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka | 2004-03-02 |
| 6686271 | Protective layers prior to alternating layer deposition | Pekka Soininen, Ernst H. A. Granneman, Suvi Haukka | 2004-02-03 |
| 6596973 | Pyrometer calibrated wafer temperature estimator | James Donald | 2003-07-22 |
| 6564810 | Cleaning of semiconductor processing chambers | Franciscus Bernardus Maria Van Bilsen | 2003-05-20 |
| 6544900 | In situ dielectric stacks | Christiaan J. Werkhoven | 2003-04-08 |
| 6540837 | Quartz wafer processing chamber | — | 2003-04-01 |
| 6534395 | Method of forming graded thin films using alternating pulses of vapor phase reactants | Christiaan J. Werkhoven, Suvi Haukka | 2003-03-18 |
| 6521503 | High temperature drop-off of a substrate | Paul Jacobson, Ravinder Aggarwal, Robert C. Haro | 2003-02-18 |