Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9127340 | Selective oxidation process | Jerome Noiray | 2015-09-08 |
| 8889565 | Selective removal of oxygen from metal-containing materials | Jerome Noiray | 2014-11-18 |
| 8367548 | Stable silicide films and methods for making the same | Vladimir Machkaoutsan | 2013-02-05 |
| 8034410 | Protective inserts to line holes in parts for semiconductor process equipment | Vladimir Kuznetsov | 2011-10-11 |
| 8002463 | Method and device for determining the temperature of a substrate | Pascal Vermont, Vladimir Kuznetsov | 2011-08-23 |
| 7754013 | Apparatus and method for atomic layer deposition on substrates | — | 2010-07-13 |
| 7670944 | Conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Kai-Erik Elers | 2010-03-02 |
| 7427329 | Temperature control for single substrate semiconductor processing reactor | Vladimir Kuznetsov | 2008-09-23 |
| 7276774 | Trench isolation structures for integrated circuits | Ivo Raaijmakers, Pekka Soininen | 2007-10-02 |
| 7153772 | Methods of forming silicide films in semiconductor devices | Vladimir Kuznetsov, Xavier Pages, Cornelius A. van der Jeugd | 2006-12-26 |
| 7102235 | Conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Yille A. Saanila, Pekka Soininen, Kai-Erik Elers | 2006-09-05 |
| 6861334 | Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition | Ivo Raaijmakers, Pekka Soininen | 2005-03-01 |
| 6831315 | Conformal thin films over textured capacitor electrodes | Ivo Raaijmakers, Suvi Haukka | 2004-12-14 |
| 6820570 | Atomic layer deposition reactor | Olli Kilpela, Ville Antero Saanila, Wei Li, Kai-Erik Elers, Juhana Kostamo +1 more | 2004-11-23 |
| 6780704 | Conformal thin films over textured capacitor electrodes | Ivo Raaijmakers, Suvi Haukka | 2004-08-24 |
| 6759325 | Sealing porous structures | Ivo Raaijmakers, Pekka Soininen, Suvi Haukka, Kai-Erik Elers, Marko Tuominen +3 more | 2004-07-06 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Ville Antero Saanila, Pekka Soininen, Kai-Erik Elers | 2004-04-27 |
| 6699783 | Method for controlling conformality with alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Suvi Haukka | 2004-03-02 |
| 6686271 | Protective layers prior to alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Suvi Haukka | 2004-02-03 |
| 6679951 | Metal anneal with oxidation prevention | Pekka Soininen, Kai-Erik Elers | 2004-01-20 |
| 6482733 | Protective layers prior to alternating layer deposition | Ivo Raaijmakers, Pekka Soininen, Suvi Haukka | 2002-11-19 |
| 5354433 | Method for producing a flow of triisobutylaluminum from liquid triisobutylaluminum containing isobutene | Laurens Franz Taemsz Kwakman, Hans W. Piekaar, Boudewijn G. Sluijk | 1994-10-11 |
| 5294572 | Method and apparatus for depositing a layer on a substrate | Hans W. Piekaar, Hubertus A. Corsius, Boudewijn G. Sluijk | 1994-03-15 |