Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180588 | Loading device, arrangement and method for loading a reaction chamber | Johannes Wesslin, Jonas Andersson | 2024-12-31 |
| 12180587 | Vacuum chamber and arrangement for atomic layer deposition | Johannes Wesslin, Jonas Andersson | 2024-12-31 |
| 12116668 | Atomic layer deposition reactor arrangement and a method for operating an atomic layer deposition reactor arrangement | Jonas Andersson, Johannes Wesslin | 2024-10-15 |
| 12104248 | Gas feeding cup and a gas manifold assembly | Johannes Wesslin, Jonas Andersson | 2024-10-01 |
| 12000043 | Precursor source arrangement and atomic layer deposition apparatus | Hulda Aminoff, Ville Miikkulainen | 2024-06-04 |
| 11970773 | Apparatus and method for atomic layer deposition (ALD) | Matti Malila | 2024-04-30 |
| 11926896 | Atomic layer deposition apparatus | Johannes Wesslin, Jonas Andersson | 2024-03-12 |
| 11634814 | Atomic layer deposition apparatus | Ville Miikkulainen, Hulda Aminoff | 2023-04-25 |
| 11549702 | Precursor supply cabinet | Johannes Wesslin, Matti Malila | 2023-01-10 |
| 11421319 | Plasma etch-resistant film and a method for its fabrication | Vasil Vorsa, Mohammad Ameen | 2022-08-23 |
| RE48871 | Method and apparatus for depositing thin films on a surface | Sven Lindfors | 2022-01-04 |
| 10961620 | Plasma etch-resistant film and a method for its fabrication | Vasil Vorsa, Mohammad Ameen | 2021-03-30 |
| 9909212 | Apparatus for processing substrate surface | Tapani Matias Alasaarela | 2018-03-06 |
| 9708710 | Atomic layer deposition method for coating a substrate surface using successive surface reactions with multiple precursors | Tapani Matias Alasaarela | 2017-07-18 |
| 8753716 | Method of depositing material using a deposition reactor | Sven Lindfors | 2014-06-17 |
| 8741062 | Apparatus and methods for deposition reactors | Sven Lindfors | 2014-06-03 |
| 8536058 | Method of growing electrical conductors | Juhana Kostamo, Kai-Erik Elers, Suvi Haukka | 2013-09-17 |
| 8496753 | Arrangement in connection with ALD reactor | Mika Jauhiainen | 2013-07-30 |
| 8475760 | Device and method for producing nanotubes | Markku Rajala, Anssi Hovinen, Jari Sinkko | 2013-07-02 |
| 7955979 | Method of growing electrical conductors | Juhana Kostamo, Kai-Erik Elers, Suvi Haukka | 2011-06-07 |
| 7922821 | Source, an arrangement for installing a source, and a method for installing and removing a source | — | 2011-04-12 |
| 7749871 | Method for depositing nanolaminate thin films on sensitive surfaces | Kai-Erik Elers, Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio | 2010-07-06 |
| 7732331 | Copper interconnect structure having stuffed diffusion barrier | Ki Bum Kim, Ivo Raaijmakers | 2010-06-08 |
| 7670944 | Conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Ville Antero Saanila, Kai-Erik Elers, Ernst H. A. Granneman | 2010-03-02 |
| 7601223 | Showerhead assembly and ALD methods | Sven Lindfors | 2009-10-13 |