Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702745 | Nozzle and nozzle head | Pekka Soininen | 2023-07-18 |
| 11214866 | Nozzle head and apparatus | Pekka Soininen | 2022-01-04 |
| 10023957 | Apparatus and method for processing substrate | Pekka Soininen | 2018-07-17 |
| 8496753 | Arrangement in connection with ALD reactor | Pekka Soininen | 2013-07-30 |