Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000043 | Precursor source arrangement and atomic layer deposition apparatus | Pekka Soininen, Hulda Aminoff | 2024-06-04 |
| 11634814 | Atomic layer deposition apparatus | Hulda Aminoff, Pekka Soininen | 2023-04-25 |