Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000043 | Precursor source arrangement and atomic layer deposition apparatus | Pekka Soininen, Ville Miikkulainen | 2024-06-04 |
| D998660 | Coating machine | Heikki Naulapää | 2023-09-12 |
| 11634814 | Atomic layer deposition apparatus | Ville Miikkulainen, Pekka Soininen | 2023-04-25 |
| D978932 | Coating machine | Heikki Naulapää | 2023-02-21 |
| D978933 | Coating machine | Heikki Naulapää | 2023-02-21 |