Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7537662 | Method and apparatus for depositing thin films on a surface | Sven Lindfors | 2009-05-26 |
| 7494927 | Method of growing electrical conductors | Juhana Kostamo, Kai-Erik Elers, Suvi Haukka | 2009-02-24 |
| 7485340 | Production of elemental films using a boron-containing reducing agent | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio | 2009-02-03 |
| 7465658 | Oxygen bridge structures and methods to form oxygen bridge structures | Ivo Raaijmakers, Kai-Erik Elers | 2008-12-16 |
| 7329590 | Method for depositing nanolaminate thin films on sensitive surfaces | Kai-Erik Elers, Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio | 2008-02-12 |
| 7323422 | Dielectric layers and methods of forming the same | Ivo Raaijmakers, Jan Willem Maes | 2008-01-29 |
| 7241677 | Process for producing integrated circuits including reduction using gaseous organic compounds | Kai-Erik Elers | 2007-07-10 |
| 7144809 | Production of elemental films using a boron-containing reducing agent | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio | 2006-12-05 |
| 7102235 | Conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Yille A. Saanila, Kai-Erik Elers, Ernst H. A. Granneman | 2006-09-05 |
| 7034397 | Oxygen bridge structures and methods to form oxygen bridge structures | Ivo Raaijmakers, Kai-Erik Elers | 2006-04-25 |
| 6936535 | Copper interconnect structure having stuffed diffusion barrier | Ki Bum Kim, Ivo Raaijmakers | 2005-08-30 |
| 6921712 | Process for producing integrated circuits including reduction using gaseous organic compounds | Kai-Erik Elers | 2005-07-26 |
| 6902763 | Method for depositing nanolaminate thin films on sensitive surfaces | Kai-Erik Elers, Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio | 2005-06-07 |
| 6887795 | Method of growing electrical conductors | Kai-Erik Elers, Suvi Haukka | 2005-05-03 |
| 6878628 | In situ reduction of copper oxide prior to silicon carbide deposition | Auguste Sophie, Hessel Sprey, Kai-Erik Elers | 2005-04-12 |
| 6863727 | Method of depositing transition metal nitride thin films | Kai-Erik Elers, Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio | 2005-03-08 |
| 6852635 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Suvi Haukka | 2005-02-08 |
| 6821889 | Production of elemental thin films using a boron-containing reducing agent | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio | 2004-11-23 |
| 6800552 | Deposition of transition metal carbides | Kai-Erik Elers, Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio | 2004-10-05 |
| 6794287 | Process for growing metal or metal carbide thin films utilizing boron-containing reducing agents | Ville Antero Saanila, Kai-Erik Elers, Sari Johanna Kaipio | 2004-09-21 |
| 6727169 | Method of making conformal lining layers for damascene metallization | Ivo Raaijmakers, Suvi Haukka, Ville Antero Saanila, Kai-Erik Elers, Ernst H. A. Granneman | 2004-04-27 |
| 6679951 | Metal anneal with oxidation prevention | Kai-Erik Elers, Ernst H. A. Granneman | 2004-01-20 |
| 6664192 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Suvi Haukka | 2003-12-16 |
| 6599572 | Process for growing metalloid thin films utilizing boron-containing reducing agents | Ville Antero Saanila, Kai-Erik Elers, Sari Johanna Kaipio | 2003-07-29 |
| 6482262 | Deposition of transition metal carbides | Kai-Erik Elers, Suvi Haukka, Ville Antero Saanila, Sari Johanna Kaipio | 2002-11-19 |