Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852635 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2005-02-08 |
| 6664192 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2003-12-16 |
| 6391785 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2002-05-21 |