Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11970773 | Apparatus and method for atomic layer deposition (ALD) | Pekka Soininen | 2024-04-30 |
| 11549702 | Precursor supply cabinet | Pekka Soininen, Johannes Wesslin | 2023-01-10 |
| 11371146 | Gas distribution unit in connection with ALD reactor | — | 2022-06-28 |